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SEMI C61-0707 (first published)
because it does not distinguish the type of center present
SECS-II defines the structure of messages into entities called items and lists of items
SEMI MF1188-1107 (Reapproved 1123)
F00100 - SEMI F1 - 高純度ガス配管系および部品の漏れ完全性仕様 Revision:SEMI F1-96 - Superseded SEMI C61-0707 (first published)NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Referenced SEMI Standards (purchase separately) SEMI S2 Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment Revision History SEMI F1 0812 (technical revision) SEMI F1 96 (technical revision) SEMI F1